0
$\begingroup$

If ions are implanted in a silicon wafer as the term 'ion implantation' suggests, how can the wafer be electrically neutral after the semiconductor doping? Aren't the ions ions electrically charged? Or do we add/remove electrons from the wafer at the same time to keep the wafer neutral?

$\endgroup$
  • $\begingroup$ Electrons flow back into the wafer to the site where the ion implants. $\endgroup$ – PhysicsDave Mar 30 at 13:28
1
$\begingroup$

Yes, an electrical current neutralizes the wafer.

One uses ions in order to accelerate them to kinetic energies that will penetrate the wafer to a certain depth. The ions in this technique are positive. The wafer should not repel the ion beam, so it is kept at ground potential.

$\endgroup$
  • $\begingroup$ Indeed, if you don’t bad things happen like luttle lightening bolt discharges vainly trying to keep the wafer closer to ground... $\endgroup$ – Jon Custer Mar 31 at 1:00

Your Answer

By clicking “Post Your Answer”, you agree to our terms of service, privacy policy and cookie policy

Not the answer you're looking for? Browse other questions tagged or ask your own question.