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The study of the performance of ultra-small structures, materials, and devices, usu. usually 0.1 to 100 nm; also, the study of manipulating materials on an atomic or molecular scale. Nanoscience is sometimes used interchangably with Nanotechnology, which is the manipulation of matter on an atomic and molecular scale.

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Smallest object resolvable by optical microscopy

I worked many years in the semiconductor industry. The company I worked for was identifying differences in chips in the 12nM range using optical imaging. This was back in 2018.
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