I am not able to derive Eq. 21 of this paper
F. Zahariev, S. S. Leang, and Mark S. Gordon, "Functional derivatives of meta-generalized gradient approximation (meta-GGA) type exchange-correlation density functionals", The Journal of Chemical Physics 138, 244108 (2013); https://doi.org/10.1063/1.4811270
I attached herewith the steps of my derivation which I have tried. Can you please help me to derive that equation? Looking forward to your kind reply.
$$\tau({\bf r}') = \frac{1}{2}\sum_i|\nabla\psi_i({\bf r'})|^2 =\frac{1}{2}\sum_i \int |\nabla\psi_i({\bf r'})|^2 \delta^3({\bf r}-{\bf r}')d{\bf r}',\tag{2} $$ \begin{equation} \begin{split} \frac{\delta \tau({\bf r}')}{\delta \psi_i({\bf r})}&= - \nabla\cdot\frac{\partial}{\partial (\nabla\psi_i({\bf r}))}\Big(\frac{1}{2}|\nabla\psi_i({\bf r'})|^2 \delta^3({\bf r} - {\bf r}')\Big)\\ &= -\nabla \cdot (\nabla\psi_i({\bf r})\delta^3({\bf r} - {\bf r}'))\\ &= - \nabla\psi_i({\bf r})\cdot\nabla\delta^3({\bf r}-{\bf r}') - \nabla^2\psi_i({\bf r})\delta^3({\bf r}-{\bf r}'). \end{split} \end{equation}