Ozone elimination I have a potential problem with airflow through a high voltage capacitively coupled RF discharge (in a tube) producing ozone. How can I remove ozone from the airflow? The use of liquids is not possible. Flow rate is quite low, in the mL per minute.
 A: This may be cheating - but ozone is generated by the interaction of the high voltage discharges and the oxygen in the air.
Why not flush the system with nitrogen - if there is no oxygen, no ozone will be produced. And a few mL per minute is not a lot of nitrogen. A 70 L bottle of nitrogen at 200 bar should expand into 14000 liter of nitrogen at STP - at 3 mL / min, 180 mL / hour that should last about 9 years...
Alternatively, as I mentioned in my comment, you could use activated carbon - it's been done, and has been shown to work to some extent. The slower the air flow, the better chance the filter has.
See also http://www.ncbi.nlm.nih.gov/pubmed/10529990 :

Activated carbon filters can be very effective at ozone removal, although not indefinitely because chemical reactions of ozone and carbon change the carbon. Initial efficiencies of the 1.27-cm thick flat samples varied from 4.6 to 98.3%.

A: The absolute cheapest thing could be to wire a variable resistor in series to try to get the discharge voltage down: it's possible that you could reach a regime where you're only ionizing some of the gases in the air, without melting the resistor.
Since ozone's "badness" comes from being hyper-reactive you might be able to remove it chemically by putting some combustion process e.g. a candle in the tube. You might also be able to filter it out.
A: Check Stanford's solution, using manganese oxide as a catalyst for converting 2xO3 into 3xO2:
http://cmgm.stanford.edu/pbrown/protocols/Ozone_Prevention.pdf
You might design a much smaller device for your small volumes.
