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In Figure-01 we have a finite rectangular plate with uniform surface charge density $\:\sigma\:$ arranged symmetrically with respect to the $\:\mr x-$axis and $\:\mr y-$axis separately. We want to find the electric field intensity vector $\:\mb E\:$ at the field point $\:\texttt P\e\plr{0,0,h}\:$ on the $\:\mr z-$axis.
Consider an infinitesimal rectangular surface element $\:\mr dx\mr dy\:$ around the point $\:\texttt A\e\plr{x,y,0}\:$ as shown in Figure-02. For the infinitesimal electric field intensity vector $\:\mr d\mb E\:$ at the field point $\:\texttt P\e\plr{0,0,h}\:$ we have
\begin{equation}
\mr d\mb E \e \plr{\mr{dE}_x,\mr{dE}_y,\mr{dE}_z}\e\dfrac{\mr d q}{4\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \dfrac{\mb p}{\:\,\Vlr{\mb p}^3}\e \dfrac{\sigma\mr dx\mr dy}{4\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \dfrac{\mb p}{\:\,\Vlr{\mb p}^3}
\tl{01}
\end{equation}
where $\:\mb p \e\plr{x,y,h}\:$ the position vector of point $\:\texttt P\:$ with respect to the infinitesimal surface element $\:\mr dx\mr dy$.
Integration of the components $\:\mr{dE}_x\:$ and $\:\mr{dE}_y\:$ on the plate surface would give null results due to the mirror symmetry with respect to the $\:\mr{yz}\:$ and $\:\mr{xz}\:$ planes respectively. For the $\:\mr{dE}_z\:$ component
\begin{equation}
\mr{dE}_z \e \dfrac{\sigma\mr dx\mr dy}{4\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \dfrac{\cos\theta}{\:\,\Vlr{\mb p}^2}\e \dfrac{\sigma\mr dx\mr dy}{4\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \dfrac{h}{\:\,\Vlr{\mb p}^3} \e \dfrac{\sigma h}{4\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \dfrac{\mr dx\mr dy}{\plr{x^2\p y^2\p h^2}^{3/2}}
\tl{02}
\end{equation}
that is
\begin{equation}
\mr {dE}_z \e \dfrac{\sigma h}{4\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \dfrac{\mr dx\mr dy}{\plr{x^2\p y^2\p h^2}^{3/2}}
\tl{03}
\end{equation}
so
\begin{equation}
\mr E_z \e \dfrac{\sigma h}{4\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \int\limits_{y\e \m b}^{y\e \p b}\blr{\:\:\int\limits_{x\e \m a}^{x\e \p a}\!\!\dfrac{\mr dx}{\plr{x^2\p y^2\p h^2}^{3/2}}}\mr dy
\tl{04}
\end{equation}
From the indefinite integral(A)
\begin{equation}
\int\dfrac{\mr dx}{\plr{x^2\p A^2}^{3/2}\Vp{\dfrac12}}\e \dfrac{x}{A^2\sqrt{x^2\p A^2\Vp{\tfrac12}}}\p \texttt{constant}
\tl{05}
\end{equation}
we have
\begin{equation}
\begin{split}
\int\limits_{x\e \m a}^{x\e \p a}\!\!\dfrac{\mr dx}{\plr{x^2\p y^2\p h^2}^{3/2}} & \e \blr{\dfrac{x}{\plr{y^2\p h^2}\sqrt{x^2\p y^2\p h^2\Vp{\tfrac12}}}}_{x \e \m a}^{x \e \p a} \\
& \e \dfrac{2a}{\plr{y^2\p h^2}\sqrt{y^2\p a^2\p h^2\Vp{\tfrac12}}}
\end{split}
\tl{06}
\end{equation}
so equation \eqref{04} yields
\begin{equation}
\mr E_z \e \dfrac{\sigma a h}{2\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \int\limits_{y\e \m b}^{y\e \p b}\dfrac{\mr dy}{\plr{y^2\p h^2}\sqrt{y^2\p a^2\p h^2\Vp{\tfrac12}}}
\tl{07}
\end{equation}
From the indefinite integral(B)
\begin{equation}
\int\dfrac{\mr dy}{\plr{y^2\p A^2}\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}}\e \dfrac{\arctan{\plr{\dfrac{By}{A\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}}}}}{AB\Vp{\Vlr{\mb p}^3}}\p \texttt{constant}
\tl{08}
\end{equation}
we have
\begin{equation}
\begin{split}
\int\limits_{y\e \m b}^{y\e \p b}\dfrac{\mr dy}{\plr{y^2\p h^2}\sqrt{y^2\p a^2\p h^2\Vp{\tfrac12}}} & \e\dfrac{\blr{\arctan{\plr{\dfrac{ay}{h\sqrt{y^2\p h^2\p a^2\Vp{\tfrac12}}}}}}_{y\e\m b}^{y\e\p b}}{ah\Vp{\Vlr{\mb p}^3}}\\
& \e \dfrac{2\arctan{\plr{\dfrac{ab}{h\sqrt{a^2\p b^2\p h^2\Vp{\tfrac12}}}}}}{ah\Vp{\Vlr{\mb p}^3}}\\
\end{split}
\tl{09}
\end{equation}
so equation \eqref{07} yields
\begin{equation}
\boxed{\:\:\mr E_z \e \dfrac{\sigma}{\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \arctan{\plr{\dfrac{ab}{h\sqrt{a^2\p b^2\p h^2\Vp{\tfrac12}}}}}\e\dfrac{\sigma}{\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \Theta\e \dfrac{\sigma}{4\pi\epsilon_0\Vp{\Vlr{\mb p}^3}} \Omega\:\:\Vp{\tfrac{\dfrac{\dfrac{e}{f}}{b}}{\dfrac{c}{\dfrac{e}{f}}}}}
\tl{10}
\end{equation}
where $\:\Theta\:$ the tetrahedral solid angle at point $\:\texttt{P}$(C) of the tetrahedron with vertex $\:\texttt{P}\:$ and base anyone of the four rectangles $\: a\times b$, see Figure-03, and $\:\Omega\e 4\Theta\:$ the tetrahedral solid angle at point $\:\texttt{P}\:$ of the tetrahedron with vertex $\:\texttt{P}\:$ and base the rectangle $\:\texttt Q_1\texttt Q_2\texttt Q_3\texttt Q_4$, see Figure-04.
Note that
\begin{equation}
\lim_{a,b\,\bl\rightarrow\bl\infty}\!\!\!\Theta\e \dfrac{\pi}{2}\,\quad \bl\implies \quad \lim_{a,b\,\bl\rightarrow\bl\infty}\!\!\!\mr E_z\e \dfrac{\sigma}{2\epsilon_0\Vp{\Vlr{\mb p}^3}}
\tl{11}
\end{equation}
the well-known result for the infinite plane.
$\bl{=\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!=}$
(A)
Proof of equation \eqref{05}
\begin{equation}
\int\dfrac{\mr dx}{\plr{x^2\p A^2}^{3/2}\Vp{\dfrac12}}\e \dfrac{x}{A^2\sqrt{x^2\p A^2\Vp{\tfrac12}}}\p \texttt{constant}
\tl{A-01}
\end{equation}
Make variable change
\begin{equation}
x\e A\tan u
\tl{A-02}
\end{equation}
so
\begin{equation}
\mr dx \e \dfrac{A}{\cos^2 u\Vp{\tfrac12}}\mr du\,,\quad \dfrac{1}{\plr{x^2\p A^2}^{3/2}\Vp{\tfrac12}}\e \dfrac{\cos^3 u}{A^3\Vp{\tfrac12}}
\tl{A-03}
\end{equation}
and
\begin{equation}
\begin{split}
\int\dfrac{\mr dx}{\plr{x^2\p A^2}^{3/2}\Vp{\tfrac12}}&\e \int\dfrac{\cos u\mr du}{A^2\Vp{\tfrac12}}\e \int\dfrac{\mr d\plr{\sin u}}{A^2\Vp{\tfrac12}}\\
& \e \dfrac{\sin u}{A^2\Vp{\tfrac12}}\p\texttt{constant}\e\dfrac{x}{A^2\sqrt{x^2\p A^2\Vp{\tfrac12}}}\p \texttt{constant}
\end{split}
\tl{A-04}
\end{equation}
since from \eqref{A-02}
\begin{equation}
\begin{split}
\sin u \e \dfrac{\tan u}{\sqrt{1\p \tan^2 u\Vp{\tfrac12}}}\e\dfrac{\plr{x/A}}{\sqrt{1\p \plr{x/A}^2\Vp{\tfrac12}}}\e\dfrac{x}{\sqrt{x^2\p A^2\Vp{\tfrac12}}}
\end{split}
\tl{A-05}
\end{equation}
$\bl{=\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!=}$
(B)
Proof of equation \eqref{08}
\begin{equation}
\int\dfrac{\mr dy}{\plr{y^2\p A^2}\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}}\e \dfrac{\arctan{\plr{\dfrac{By}{A\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}}}}}{AB\Vp{\Vlr{\mb p}^3}}\p \texttt{constant}
\tl{B-01}
\end{equation}
Make variable change
\begin{equation}
y\e \sqrt{A^2 \p B^2\Vp{\tfrac12}}\tan v
\tl{B-02}
\end{equation}
so
\begin{equation}
\begin{split}
\mr dy & \e \dfrac{\sqrt{A^2 \p B^2\Vp{\tfrac12}}}{\cos^2 v\Vp{\tfrac12}}\mr dv\,,\quad \sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}\e \dfrac{\sqrt{A^2 \p B^2\Vp{\tfrac12}}\Vp{\tfrac12}}{\cos v}\\
y^2\p A^2 & \e \dfrac{B^2\sin^2 v\p A^2}{\cos^2 v}
\end{split}
\tl{B-03}
\end{equation}
and
\begin{equation}
\begin{split}
&\dfrac{\mr dy}{\plr{y^2\p A^2}\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}} \e \dfrac{\plr{\dfrac{\sqrt{A^2 \p B^2\Vp{\tfrac12}}}{\cos^2 v\Vp{\tfrac12}}}\mr dv}{\plr{\dfrac{B^2\sin^2 v\p A^2}{\cos^2 v}\Vp{\dfrac{\sqrt{A^2 \p B^2\Vp{\tfrac12}}\Vp{\tfrac12}}{\cos v}}}\plr{\dfrac{\sqrt{A^2 \p B^2\Vp{\tfrac12}}\Vp{\tfrac12}}{\cos v}}}\\
&\e \dfrac{\cos v \mr dv}{B^2\sin^2 v\p A^2}\e \dfrac{1}{AB}\dfrac{\mr d\plr{\dfrac{B}{A}\sin v}}{1\p\plr{\dfrac{B}{A}\sin v}^2}\e \dfrac{1}{AB\Vp{{A^2}^2}}\dfrac{\mr d \mr w}{\plr{1\p\mr w^2}\Vp{{A^2}^2}}\\
&\e \dfrac{1}{AB}\mr d\plr{\arctan \mr w\Vp{A^2}}
\end{split}
\tl{B-04}
\end{equation}
that is
\begin{align}
&\dfrac{\mr dy}{\plr{y^2\p A^2}\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}}\e \dfrac{1}{AB}\mr d\plr{\arctan \mr w\Vp{A^2}}
\tl{B-05a}\\
&\texttt{where}
\nonumber\\
&\mr w \e \dfrac{B}{A}\sin v\e \dfrac{B}{A}\dfrac{\tan v}{\sqrt{1 \p \tan^2 v\Vp{\tfrac12}}}\e \dfrac{B y}{A\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}}
\tl{B-05b}
\end{align}
From equations \eqref{B-05a} and \eqref{B-05b} we have
\begin{equation}
\begin{split}
&\int\dfrac{\mr dy}{\plr{y^2\p A^2}\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}}\e \dfrac{1}{AB}\int\mr d\plr{\arctan \mr w\Vp{A^2}}\e \dfrac{\arctan \mr w}{AB}\p\texttt{constant}\\
&\e\dfrac{\arctan{\plr{\dfrac{By}{A\sqrt{y^2\p A^2\p B^2\Vp{\tfrac12}}}}}}{AB\Vp{\Vlr{\mb p}^3}}\p \texttt{constant}
\end{split}
\tl{B-06}
\end{equation}
QED.
$\bl{=\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!=}$
(C)
Interpretation of angle $\Theta$ in equation \eqref{10}
Reference : My answer in What is the electric field flux through the base of a cube from a point charge infinitesimally close to a vertex?.
The angle $\Theta$ in equation \eqref{10} is a solid angle, not a plane one. This is explained in the above referenced answer of mine by equation (01) under the paragraph Proposition-Practical Rule. For completeness the Figure-01 and Figure-03 therein are copied as Figure-05 and Figure-06 respectively herein.
Above referenced equation (01) is proved in Section Differential Geometry. In this proving Section we encounter equations with integrals identical to these herein. For example the indefinite integral equations \eqref{dg-08} and \eqref{dg-11} therein
\begin{equation}
\int\dfrac{1}{\bigl(x^{2}\!+\!y^{2}\!+\!R^{2}\bigr)^{\frac32}}\mathrm{d}x =\dfrac{x}{\left(y^{2}\!+\!R^{2}\right)\sqrt{y^{2}\!+\!x^{2}\!+\!R^{2}}}+\text{constant}
\tl{dg-08}
\end{equation}
\begin{equation}
\int \dfrac{a}{\left(y^{2}\!+\!R^{2}\right)\sqrt{y^{2}\!+\!a^{2}\!+\!R^{2}}} \mathrm{d}y=\dfrac{\arctan\left(\dfrac{a y}{R\sqrt{y^{2}\!+\!a^{2}\!+\!R^{2}}}\right)}{R}+\text{constant}
\tl{dg-11}
\end{equation}
are identical to \eqref{05} and \eqref{08} respectively herein.
Note that in the referenced answer and in equation \eqref{dg-07}
\begin{equation}
\mathrm{S} =R^{3}\int\limits_{y=0}^{y=b}\int\limits_{x=0}^{x=a}\dfrac{1}{\bigl(x^{2}\!+\!y^{2}\!+\!R^{2}\bigr)^{\frac32}}\mathrm{d}x \mathrm{d}y
\tl{dg-07}
\end{equation}
$\:\mr S\:$ is the surface area of a spherical patch, the (inverse stereographic) projection of rectangle $\:\mr{ADBC}\:$ on the sphere with center at point $\:Q\:$ and radius $\:R$, see Figure-06.
\begin{equation}
\Theta =\dfrac{\mathrm{S}}{R^{2}}=\arctan\left(\dfrac{a\,b}{R\sqrt{a^{2}\!+\!b^{2}\!+\!R^{2}}}\right)=\arctan\left(\dfrac{a\,b}{R\, d}\right)
\tl{dg-13}
\end{equation}
is the solid angle by which the point $\:Q\:$ "sees" the rectangle $\:\mr{ADBC}$.
By analogy in equation \eqref{04}
\begin{equation}
\mr S \e h^3 \int\limits_{y\e \m b}^{y\e \p b}\blr{\:\:\int\limits_{x\e \m a}^{x\e \p a}\!\!\dfrac{\mr dx}{\plr{x^2\p y^2\p h^2}^{3/2}}}\mr dy
\tl{C-01}
\end{equation}
is the surface area of a spherical patch, the (inverse stereographic) projection of rectangle $\:\texttt Q_1\texttt Q_2\texttt Q_3\texttt Q_4$ on the sphere with center at point $\:\mr P\:$ and radius $\:h$, see Figure-01, so
\begin{equation}
\Omega \e \dfrac{\mr S}{h^2}\e h \int\limits_{y\e \m b}^{y\e \p b}\blr{\:\:\int\limits_{x\e \m a}^{x\e \p a}\!\!\dfrac{\mr dx}{\plr{x^2\p y^2\p h^2}^{3/2}}}\mr dy
\tl{C-02}
\end{equation}
is the solid angle by which the point $\:\texttt P\:$ "sees" the rectangle $\:\texttt Q_1\texttt Q_2\texttt Q_3\texttt Q_4$, see Figure-04.
$\bl{=\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!==\!=\!=\!=}$