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Feb 2, 2021 at 19:18 vote accept rwallace
Jan 31, 2021 at 23:33 comment added user137289 @annav I am well aware of tracks, for example in mica for radiometric dating. But OP was explicitly not asking about internal damage. The faster the atom, the sooner it passes the surface layer. That is why the sputter yield has a maximum at some energy (about 10 keV as it turns out experimentally).
Jan 31, 2021 at 13:06 comment added anna v it is a different story see link.springer.com/article/10.1557/JMR.2010.0180 The destruction is a track in the material, not sputter
Jan 31, 2021 at 11:05 comment added user137289 @annav It does not matter. At higher energies, the ions just get implanted at greater depth in the material. See for example en.wikipedia.org/wiki/Ion_implantation
Jan 31, 2021 at 10:45 comment added anna v Note the question is about "relativistic" ions keV and even MeV , depending on mass of the ion are not relativistic velocities
Jan 31, 2021 at 8:54 history answered user137289 CC BY-SA 4.0