I know of X-Ray diffraction, which produces a pattern corresponding to the inverse Fourier Transform of the lattice (reciprocal lattice). While this method is widely employed, it provides more information than I need - I don't want to find out what Bravais lattice I'm examining, but just how homogeneous this lattice is.
Which methods may be used to determine the homogeneity of the lattice? Can electron microscopes be used for this (SEM, TEM)? What spatial resolutions the additional methods posses?
I'm trying to figure out what techniques one can use in order to measure the lattice's deformation in vicinity of interfaces with another latices or amorphous materials (the picture is just a demonstration of such an interface between Si and Si02):
To my best knowledge, XRD does not provide high enough spatial resolution for this kind of measurements.