Tell me more ×
Physics Stack Exchange is a question and answer site for active researchers, academics and students of physics. It's 100% free, no registration required.
up vote 1 down vote favorite
1

What unexplored areas (known unknowns) are there in atomic layer deposition (ALD)? What unexplored applications of ALD are there? It seems like people use it a lot for coatings of either insulators or sometimes transparent conducting contacts. What else could you do with it?

share|improve this question

2 Answers

up vote 1 down vote

I can't answer for the unknown part of your question but it is also used for semiconductors and photopholtaic panels.

share|improve this answer
More specifically, it's used to deposit HfO2 in advanced 45nm and smaller tech nodes. Probably it's the most money-generating application of ALD :-) – BarsMonster Sep 2 '12 at 21:20
up vote 1 down vote

"Other applications with similar demanding requirements outside of the semiconductor industry are low electron leakage dielectrics for magnetic read/write heads... and diffusion barrier coatings with low gas permeability..." (http://chem.colorado.edu/georgegroup/images/stories/300.pdf )

share|improve this answer
Oh neat! I didn't realize that diffusion barriers for gas could be made with ALD, but I suppose it makes sense in hindsight. I will check that out. Very cool! Do you think plasma be contained? Plasma could ionize the atomic-layer-deposited gas diffusion barrier. – Jennifer Tomlin Sep 5 '12 at 1:53
Sorry, I just don't have an opinion on this issue. – akhmeteli Sep 5 '12 at 2:16

Your Answer

 
discard

By posting your answer, you agree to the privacy policy and terms of service.

Not the answer you're looking for? Browse other questions tagged or ask your own question.